Broadway Engineering Services Team, Inc.

Endura 5500 >
Centura 5200 / 5300 >
Precision 5000 >

BEST is a Leading Supplier of Refurbished Applied Materials^® Equipment and Service for the Semiconductor Industry.

BEST offers completely refurbished Applied Materials^® Etch, CVD and PVD systems at a significant savings over the cost of a new unit, without sacrificing quality. All of our refurbished systems are guaranteed to meet or exceed the original published manufactured specifications. All of these systems include installation and warranty.

BEST can supply many configurations of the Endura 5500, Centura 5200 / 5300 and P5000. System mainframe types are: RTP (Rapid Thermal Process), DCVD (Dielectric CVD), WCVD (Tungsten CVD), Tungsten Etch Back and Dielectric Etch. This also includes configuring your system to your specific wafer size with a variety of options.

Take a look and see what BEST can offer you.

Endura PVD Processes
		Standard Aluminum (Al)
		Planarized Hot Aluminum
		(HTHU)
		Standard Titanium (Ti)
		Coherent Titanium (Coh Ti)
		Dedicated Titanium Nitride (TiN)
		Titanium / Titanium Nitride (TTN)
		Coherent Titanium / Titanium Nitride (Coh TTN)
		Titanium Tungsten (TiW)
		Tungsten (W)

Endura Chambers
		Standard Body Chamber
		Wide Body PVD Chamber
		Water Cooled PVD Chamber
		Paste Chamber (Ch-5)
		Preclean I / II chamber
		Orienter / Degas Chamber
		PVD Degas Chamber
		Vectra IMP

Endura System Options
		Specific Wafer Size Configuration
		Wide or Narrow Body Load Locks
		HP Motorized Lifts
		Single or Dual Orienter / Degas Chambers
		HP, HP+ or VHP Robots
		Fast Wafer Mapping
		Buffer / Transfer Lid Hoist
		3Phase or Enhanced Cryopumps
		Through-the-Wall or Ballroom Style Installation

Centura Processes
		ASP
		Sputter Etch
		Oxide Etch
		Poly Etch
		Nitride Etch
		DPS Poly or Metal Etch
		HDP-CVD
		TEOS, Doped / Undoped
		WCVD
		WSiX
		RTP
		PVD
		SACVD

Centura Chambers
		ASP+
		Sputter Etch
		MxP
		MxP+
		eMxP+ and Super eMxP+
		DPS, R0/R1
		WxP
		DxZ
		WxZ
		HDP
		RTP (Mod 1), RTPxe
		Universal CVD
		Preclean II chamber
		Orienter / Degas Chamber
		Single / Multi Slot Cool Down Chamber

Centura System Options
		Phase II Mainframe
		Centura II
		High Temp Mainframe
		Narrow or Wide Body Loadlock Chambers
		On The Fly Center finder (OTF)
		Fast Wafer Mapping
		HP, HP+ or VHP Robots
		Transfer Lid Hoist
		High Optical Throughput Endpoint System (H.O.T.)
		Monochromator Endpoint
		Through the wall or Ballroom Style Installation

P5000 Processes
		ASP
		Sputter Etch
		Oxide Etch
		Poly Etch
		Nitride Etch
		Metal Etch
		TEOS, Doped / Undoped
		WCVD
		WSiX
		SACVD

P5000 Chambers
		ASP
		Mark II
		MxP, MxP+
		MxP+ Poly
		WxP
		DxZ
		WxZ
		Universal CVD
		WCVD
		Orienter Chamber

P5000 System Options
		Mark II Mainframe
		8, 15, or 29 slot storage Elevator
		Phase III Robot and Cassette Handler
		Phase IV Hotbox
		PLIS
		Wafer Position System (W.P.S.)
		High Optical Throughput Endpoint System (H.O.T.)
		Monochromator Endpoint
		Through-the-Wall or Ballroom Style Installation
		Standard or Modular Remote Frame